SEMI -
about semi
Optinet's Comment: Most specifications of positioning systems
used in Semiconductor applications,
require compliance with SEMI S2 Standards.
SEMI S2 is a SEMI standard for Saefty, Health and Protection of the Environment.
The current edition of SEMI S2- 0709 was approved in July 2006.
The release of the next edition is expected in July 2012.
SEMATECH Guidebook for
SEMI S2-93 -
http://ismi.sematech.org/standards/guidance/eshdocs/s2rev2.pdf
This guidebook, by SEMATECH, provides a comprehensive interpretation and
application recommendations of SEMI S2-93 and S8-95 (S8).
The consortium, called SEMATECH (SEmiconductor MAnufacturing TECHnology), was
formed in 1987 by 14 U.S.-based semiconductor manufacturers
and the U.S. government to solve common manufacturing problems by
leveraging resources and sharing risks.
It is SEMATECH’s philosophy that "no job is so important that it may be performed
without regard for safety, health or protection of the environment."
Buy SEMI standards here -
http://www.semi.org/en/Store/Standards/CTR_028404